SP82 Absolute Pressure Sensor
GENERIC INFORMATION
The SP82 absolute sensor has been designed to enable ultra low long term drift with typical drift values much below 0.02% of Full Scale Output. The basic pressure sensing element of the SP82 is a monolithic silicon chip with a cavity etched out to form a diaphragm, which top side contains implanted piezoresitive elements forming a Wheatstone bridge. All our MEMS devices include a temperature sensor and a resistor for heating mode integrated at the chip level and also located on the top side of the silicon sensor chip. Absolute pressure sensors have the pressure inlet port at the lower side of the sensor. The upper side of the diaphragm has a separate and unique vacuum reference chamber attached which is hermetically sealed and covered by a metal cap. The Mean Time Before Failure (MTBF) value for the SP82 sensor is more than 20 years and is based on field failures and flight hours from more than 20 years of usage.
